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Surface Step Height Profiling and Features measurement

Using AEP profilers — contact and/or optical based techniques AEP metrology can virtually do Surface profiling such as defect measurement, surface feature analysis etc.for any type of surface.

- Step Height with sub angstrom(1Å) resolution
- Surface roughness with sub Angstrom(5Å) resolution
- Wear Track, Scratch Depth, Pile up measurement
- Flatness, Bow, Radius of curvature etc. measurement
- Thin Film Stress measurement
- Film/ Coating thickness
- Surface profiling and features measurement
  NanoMap-500LS NanoMap-D NanoMap-O NanoMap-LS NanoMap-500ES NanoMap-PS  

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