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 Product info...
Inspection(Wafer/Glass/Flexible)
   
YPI-N-Series
 

Work size Max 200 mm 200 mm
Scanning system X-Y Scanning θX Scanning
Throughput/Takt time □200 mm for 4minφ 200 mm 3min
Work Placement Automatically by transfer robot
Outer Dimension W 1320 x D 1000 x H 1700 mm
Net weight 800 kg
Power consumption 1.5 kW ( 100V )
Testable substrates Si wafersvariety of wafers with films
Minimum detectable particle size Si wafers: 0.1 μ

 
 
     
     
     


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