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 Product info...
Inspection(Wafer/Glass/Flexible)
   
YPI-MX-Series
   
Work size Max 200 mm 200 mm
Scanning system X-Y scanningθ-X scanning
Throughput /takt time □200 mm 4minφ200 mm 3min
Work placement Manual
Outer dimensions W 900 x D 1000 x H 1757 mm
Net weight 500 kg
Power consumption 1.5 kW ( 100V )
Testable substrates QuartzSapphires、SiC substrates with epitaxial layer, etc.
Min detectable particle size Quartz: 0.2 μm
 
   첨부파일 Test-1 :  
   
   


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